Shape and Functional Elements of the Bulk Silicon Microtechnique [electronic resource] : A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf.

By: Contributor(s): Material type: Computer fileComputer filePublication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.Description: v.: digitalISBN:
  • 9783540268765
Subject(s): LOC classification:
  • QC611.8.S5  F78 2005
Online resources: In: Springer eBooks
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Holdings
Item type Current library Call number URL Copy number Status Notes Date due Barcode
Libro Electrónico Libro Electrónico Biblioteca Digital Colección Digital QC611.8.S5 F78 2005 (Browse shelf(Opens below)) Link to resource 1 Available Springerlink BDIG00012503

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