Shape and Functional Elements of the Bulk Silicon Microtechnique [electronic resource] : A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf.
Material type: Computer filePublication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.Description: v.: digitalISBN:- 9783540268765
- QC611.8.S5 F78 2005
Item type | Current library | Call number | URL | Copy number | Status | Notes | Date due | Barcode | |
---|---|---|---|---|---|---|---|---|---|
Libro Electrónico | Biblioteca Digital Colección Digital | QC611.8.S5 F78 2005 (Browse shelf(Opens below)) | Link to resource | 1 | Available | Springerlink | BDIG00012503 |
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