CMOS Hotplate Chemical Microsensors [electronic resource] /
by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann.
- 1a ed.
- Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007.
- v.: digital
- Microtechnology and MEMS, 1615-8326 .
9783540695622
Engineering Chemistry, Physical organic Optical materials Engineering Physics and Applied Physics in Engineering Physical Chemistry Optical and Electronic Materials