Lobontiu, Nicolae. <br/><br/>
Mechanics of Microelectromechanical Systems  [electronic resource] / 
by Nicolae Lobontiu, Ephrahim Garcia. 
 - 1a ed. 
 - Boston, MA :  Springer Science + Business Media, Inc.,  2005. 
 -  v.: digital 
<br/><br/><label>ISBN: </label>9780387230375 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Mechanical engineering<br/>Engineering<br/>Mechanical Engineering
<br/><br/><label>LC Class. No.: </label>TK7875  / L63 2005