TY  - DATA
AU  - Lobontiu,Nicolae
AU  - Garcia,Ephrahim
ED  - SpringerLink (Online service)
TI  - Mechanics of Microelectromechanical Systems
SN  - 9780387230375
AV  - TK7875 L63 2005
PY  - 2005///
CY  - Boston, MA
PB  - Springer Science + Business Media, Inc.
KW  - Engineering
KW  - Mechanical engineering
KW  - Mechanical Engineering
UR  - http://dx.doi.org/10.1007/b100026
ER  -