TY - DATA AU - Basting,Dirk AU - Marowsky,Gerd ED - SpringerLink (Online service) TI - Excimer Laser Technology SN - 9783540266679 AV - TA1695 B37 2005 PY - 2005/// CY - Berlin, Heidelberg PB - Springer-Verlag Berlin Heidelberg KW - Physics KW - Chemistry, Physical organic KW - Weights and measures KW - Electromagnetism KW - Laser physics KW - Electromagnetism, Optics and Lasers KW - Physical Chemistry KW - Measurement Science, Instrumentation KW - Laser Technology and Physics, Photonics KW - Physics and Applied Physics in Engineering UR - http://dx.doi.org/10.1007/b137894 ER -