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1.
Integrated Chemical Microsensor Systems in CMOS Technology [electronic resource] / by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. by Series: Microtechnology and MEMS
Material type: Computer file Computer file; Format: electronic
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TK7875 H54 2005.

2.
Capillary Forces in Microassembly [electronic resource] : Modeling, Simulation, Experiments, and Case Study / by Pierre Lambert. by Series: Microtechnology And Mems
Material type: Computer file Computer file; Format: electronic available online remote
Publication details: Boston, MA : Springer-Verlag US, 2007
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TK7875 L33 2007.

3.
Micromechanical Photonics [electronic resource] / by Hiroo Ukita. by Series: Microtechnology and Mems
Material type: Computer file Computer file; Format: electronic
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TA1520 U35 2006.

4.
CMOS Hotplate Chemical Microsensors [electronic resource] / by Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann. by Series: Microtechnology and MEMS
Edition: 1a ed.
Material type: Computer file Computer file; Format: electronic
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TK875 G73 2007.

5.
CCD Image Sensors in Deep-Ultraviolet [electronic resource] : Degradation Behavior and Damage Mechanisms / by Flora M. Li, Arokia Nathan. by Series: Microtechnology and Mems
Material type: Computer file Computer file; Format: electronic
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: QB121 S78 2005.

6.
Force Sensors for Microelectronic Packaging Applications [electronic resource] / by Jürg Schwizer, Michael Mayer, Oliver Brand. by Series: Microtechnology and MEMS ; 1615-8326
Edition: 1a ed.
Material type: Computer file Computer file; Format: electronic
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TK7874 S39 2005.

7.
Piezoelectric Multilayer Beam Bending Actuators [electronic resource] : Static and Dynamic Behavior and Aspects of Sensor Integration / by Rüdiger G. Ballas. by Series: Microtechnology and Mems
Edition: 1a ed.
Material type: Computer file Computer file; Format: electronic
Publication details: Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2007
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TJ7872.P54 B35 2007.

8.
Thermal Transport for Applications in Micro/Nanomachining [electronic resource] / by Basil T. Wong, M. Pinar Mengüç. by Series: Microtechnology and MEMS
Material type: Computer file Computer file; Format: electronic
Publication details: Berlin, Heidelberg : Springer Berlin Heidelberg, 2008
In: Springer eBooks
Online resources:
Availability: Items available for loan: Biblioteca Digital (1)Call number: TA418.9.N35 W66 2008.

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