Shape and Functional Elements of the Bulk Silicon Microtechnique (Record no. 26204)

MARC details
000 -LEADER
fixed length control field 01206nmm a22003255u 4500
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20210513094919.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 100301s2005 xx j eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9783540268765
050 04 - LIBRARY OF CONGRESS CALL NUMBER
Classification number QC611.8.S5
Item number F78 2005
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Frühauf, Joachim.
245 10 - TITLE STATEMENT
Title Shape and Functional Elements of the Bulk Silicon Microtechnique
Medium [electronic resource] :
Remainder of title A Manual of Wet-Etched Silicon Structures /
Statement of responsibility, etc by Joachim Frühauf.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc Berlin, Heidelberg :
Name of publisher, distributor, etc Springer-Verlag Berlin Heidelberg,
Date of publication, distribution, etc 2005.
300 ## - PHYSICAL DESCRIPTION
Other physical details v.: digital
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Chemistry
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Chemical engineering
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microwaves
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Electronics
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Optical materials
650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Chemistry
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Optical and Electronic Materials
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Electronics and Microelectronics, Instrumentation
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Ceramics, Glass, Composites, Natural Methods
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microwaves, RF and Optical Engineering
650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Industrial Chemistry/Chemical Engineering
710 2# - ADDED ENTRY--CORPORATE NAME
Corporate name or jurisdiction name as entry element SpringerLink (Online service)
773 0# - HOST ITEM ENTRY
Title Springer eBooks
856 40 - ELECTRONIC LOCATION AND ACCESS
Uniform Resource Identifier http://dx.doi.org/10.1007/b138230
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme Biblioteca del Cogreso de los Estados Unidos
Koha item type Libro Electrónico
Holdings
Estado de pérdida Fuente de clasificación Estado del daño No para préstamo Ubicación permanente Ubicación actual Apartado o colección Fecha de adquisición Edición Área del conocimiento Total Checkouts Clasificación Código de Barras Date last seen Número de copia Identificador universal de recursos URL Costo por reposición Tipo de recurso Nota pública
  Biblioteca del Cogreso de los Estados Unidos     Biblioteca Digital Biblioteca Digital Colección Digital 13/05/2021 1a ed. Ciencias Naturales y Exactas   QC611.8.S5 F78 2005 BDIG00012503 13/05/2021 1 http://dx.doi.org/10.1007/b138230 1.00 Libro Electrónico Springerlink