Hierlemann, Andreas. <br/><br/>
Integrated Chemical Microsensor Systems in CMOS Technology  [electronic resource] / 
by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2005. 
 -  v.: digital 
 - Microtechnology and MEMS,  1615-8326 .
<br/><br/><label>ISBN: </label>9783540273721 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemistry<br/>Analytical biochemistry<br/>Weights and measures<br/>Electronics<br/>Optical materials<br/>Nanotechnology<br/>Surfaces (Physics)<br/>Chemistry<br/>Nanotechnology<br/>Analytical Chemistry<br/>Optical and Electronic Materials<br/>Surfaces and Interfaces, Thin Films<br/>Measurement Science, Instrumentation<br/>Electronics and Microelectronics, Instrumentation
<br/><br/><label>LC Class. No.: </label>TK7875  /  H54 2005