TY - DATA AU - Hierlemann,Andreas AU - Baltes,H. AU - Fujita,Hiroyuki AU - Liepmann,Dorian ED - SpringerLink (Online service) TI - Integrated Chemical Microsensor Systems in CMOS Technology SN - 9783540273721 AV - TK7875 H54 2005 PY - 2005/// CY - Berlin, Heidelberg PB - Springer-Verlag Berlin Heidelberg KW - Chemistry KW - Analytical biochemistry KW - Weights and measures KW - Electronics KW - Optical materials KW - Nanotechnology KW - Surfaces (Physics) KW - Analytical Chemistry KW - Optical and Electronic Materials KW - Surfaces and Interfaces, Thin Films KW - Measurement Science, Instrumentation KW - Electronics and Microelectronics, Instrumentation UR - http://dx.doi.org/10.1007/b138987 ER -