Ukita, Hiroo. <br/><br/>
Micromechanical Photonics  [electronic resource] / 
by Hiroo Ukita. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin Heidelberg,  2006. 
 -  v.: digital 
 - Microtechnology and Mems,  1615-8326 .
<br/><br/><label>ISBN: </label>9783540313724 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Physics<br/>Mechanics<br/>Physical optics<br/>Microwaves<br/>Physics<br/>Applied Optics, Optoelectronics, Optical Devices<br/>Mechanics<br/>Physics and Applied Physics in Engineering<br/>Microwaves, RF and Optical Engineering
<br/><br/><label>LC Class. No.: </label>TA1520  / U35 2006