TY - DATA AU - Ukita,Hiroo ED - SpringerLink (Online service) TI - Micromechanical Photonics SN - 9783540313724 AV - TA1520 U35 2006 PY - 2006/// CY - Berlin, Heidelberg PB - Springer-Verlag Berlin Heidelberg KW - Physics KW - Mechanics KW - Physical optics KW - Microwaves KW - Applied Optics, Optoelectronics, Optical Devices KW - Physics and Applied Physics in Engineering KW - Microwaves, RF and Optical Engineering UR - http://dx.doi.org/10.1007/978-3-540-31372-4 ER -