Behrisch, Rainer. <br/><br/>
Sputtering by Particle Bombardment  Experiments and Computer Calculations from Threshold to MeV Energies /  [electronic resource] : 
edited by Rainer Behrisch, Wolfgang Eckstein. 
 - Berlin, Heidelberg :  Springer-Verlag Berlin/Heidelberg,  2007. 
 -  v.: digital 
 - Topics in Applied Physics,  110  0303-4216 .
<br/><br/><label>ISBN: </label>9783540445029 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Chemistry<br/>Plasma (Ionized gases)<br/>Surfaces (Physics)<br/>Chemistry<br/>Surfaces and Interfaces, Thin Films<br/>Atoms and Molecules in Strong Fields, Plasma Physics
<br/><br/><label>LC Class. No.: </label>QC176.8.S72  / B44 2007