TY  - DATA
AU  - Behrisch,Rainer
AU  - Eckstein,Wolfgang
ED  - SpringerLink (Online service)
TI  - Sputtering by Particle Bombardment: Experiments and Computer Calculations from Threshold to MeV Energies 
T2  - Topics in Applied Physics,
SN  - 9783540445029
AV  - QC176.8.S72 B44 2007
PY  - 2007///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin/Heidelberg
KW  - Chemistry
KW  - Plasma (Ionized gases)
KW  - Surfaces (Physics)
KW  - Surfaces and Interfaces, Thin Films
KW  - Atoms and Molecules in Strong Fields, Plasma Physics
UR  - http://dx.doi.org/10.1007/978-3-540-44502-9
ER  -