Dziuban, Jan A. Bonding in Microsystem Technology [electronic resource] / by Jan A. Dziuban. - 1a ed. - Dordrecht : Springer, 2006. - v.: digital - Springer Series in Advanced Microelectronics, 24 1437-0387 ; . ISBN: 9781402045899 Subjects--Topical Terms: MicrotecnologĂaSistemas microelectromecánicos LC Class. No.: TK7874