Thermal Transport for Applications in Micro/Nanomachining [electronic resource] /
by Basil T. Wong, M. Pinar Mengüç.
- Berlin, Heidelberg : Springer Berlin Heidelberg, 2008.
- v.: digital
- Microtechnology and MEMS, 1615-8326 .
9783540736073
Chemistry Thermodynamics Engineering Electronics Nanotechnology Chemistry Nanotechnology Electronics and Microelectronics, Instrumentation Engineering, general Thermodynamics