Depla, Diederik. <br/><br/>
Reactive Sputter Deposition  [electronic resource] / 
edited by Diederik Depla, Stijn Mahieu. 
 - 1a ed. 
 - Berlin, Heidelberg :  Springer Berlin Heidelberg,  2008. 
 -  v.: digital 
 - Springer Series in Materials Science,  109  0933-033X ; .
<br/><br/><label>ISBN: </label>9783540766643 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Deposición catódica (Proceso galvanoplastia)<br/>Películas delgadas
<br/><br/><label>LC Class. No.: </label>TS695  / D47 2008