TY - DATA AU - Alford,Terry L. AU - Feldman,Leonard C. AU - Mayer,James W. ED - SpringerLink (Online service) TI - Fundamentals of Nanoscale Film Analysis SN - 9780387292618 AV - QC176.83 A44 2007 PY - 2007/// CY - Boston, MA PB - Springer Science+Business Media, Inc. KW - Chemistry KW - Condensed matter KW - Particles (Nuclear physics) KW - Electronics KW - Nanotechnology KW - Surfaces (Physics) KW - Characterization and Evaluation of Materials KW - Surfaces and Interfaces, Thin Films KW - Solid State Physics and Spectroscopy KW - Condensed Matter KW - Electronics and Microelectronics, Instrumentation UR - http://dx.doi.org/10.1007/978-0-387-29261-8 ER -