Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration [electronic resource] /
by J. Laconte, D. Flandre, J. -P. Raskin.
- Boston, MA : Springer, 2006.
- v.: digital
9780387288437
Engineering Particles (Nuclear physics) Physical optics Electronics Systems engineering Surfaces (Physics) Engineering Physics and Applied Physics in Engineering Electronics and Microelectronics, Instrumentation Circuits and Systems Solid State Physics and Spectroscopy Applied Optics, Optoelectronics, Optical Devices Surfaces and Interfaces, Thin Films