TY - DATA AU - Perevoschikov,Victor A. AU - Skoupov,Vladimir D. ED - SpringerLink (Online service) TI - Gettering Defects in Semiconductors SN - 9783540294993 AV - TK7871.85 P47 2005 PY - 2005/// CY - Berlin, Heidelberg PB - Springer Berlin Heidelberg KW - Chemistry KW - Chemical engineering KW - Optical materials KW - Optical and Electronic Materials KW - Industrial Chemistry/Chemical Engineering UR - http://dx.doi.org/10.1007/3-540-29499-6 ER -