000			01031nmm a22003135u 4500
005			20210222182352.0
008			100301s2006 xx j eng d
020			_a9783540313724
050	0	4	_aTA1520 _bU35 2006
100	1		_aUkita, Hiroo.
245	1	0	_aMicromechanical Photonics _h[electronic resource] / _cby Hiroo Ukita.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2006.
300			_bv.: digital
440		0	_aMicrotechnology and Mems, _x1615-8326
650		0	_aPhysics
650		0	_aMechanics
650		0	_aPhysical optics
650		0	_aMicrowaves
650	1	4	_aPhysics
650	2	4	_aApplied Optics, Optoelectronics, Optical Devices
650	2	4	_aMechanics
650	2	4	_aPhysics and Applied Physics in Engineering
650	2	4	_aMicrowaves, RF and Optical Engineering
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-31372-4
942			_2lcc _cLIE
999			_c14872 _d14872