000			01176nmm a22003495u 4500
999			_c16840 _d16840
005			20201130124430.0
008			100301s2007 xx j eng d
020			_a9783540695622
050	0	4	_aTK875 _bG73 2007
100	1		_aGraf, Markus.
245	1	0	_aCMOS Hotplate Chemical Microsensors _h[electronic resource] / _cby Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann.
250			_a1a ed.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2007.
300			_bv.: digital
440		0	_aMicrotechnology and MEMS, _x1615-8326
650		0	_aEngineering
650		0	_aChemistry, Physical organic
650		0	_aOptical materials
650	1	4	_aEngineering
650	2	4	_aPhysics and Applied Physics in Engineering
650	2	4	_aPhysical Chemistry
650	2	4	_aOptical and Electronic Materials
700	1		_aBarrettino, Diego.
700	1		_aBaltes, Henry P.
700	1		_aHierlemann, Andreas.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-69562-2
942			_2lcc _cLIE