000			01356nmm a22003855u 4500
005			20210222145127.0
008			100301s2007 xx j eng d
020			_a9780387329895
050	0	4	_aTK7874 _bS84 2007
100	1		_aSuhir, E.
245	1	0	_aMicro- and Opto-Electronic Materials and Structures: Physics, Mechanics, Design, Reliability, Packaging _h[electronic resource] / _cedited by E. Suhir, Y. C. Lee, C. P. Wong.
260			_aBoston, MA : _bSpringer Science+Business Media, LLC, _c2007.
300			_bv.: digital
650		0	_aEngineering
650		0	_aParticles (Nuclear physics)
650		0	_aEngineering design
650		0	_aSystem safety
650		0	_aElectronics
650		0	_aOptical materials
650		0	_aSurfaces (Physics)
650	1	4	_aEngineering
650	2	4	_aElectronics and Microelectronics, Instrumentation
650	2	4	_aOptical and Electronic Materials
650	2	4	_aEngineering Design
650	2	4	_aSolid State Physics and Spectroscopy
650	2	4	_aSurfaces and Interfaces, Thin Films
650	2	4	_aQuality Control, Reliability, Safety and Risk
700	1		_aLee, Y. C.
700	1		_aWong, C. P.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/0-387-32989-7
942			_2lcc _cLIE
999			_c17444 _d17444