000 01218nmm a22003615u 4500
999 _c17781
_d17781
005 20200704095311.0
008 100301s2006 xx j eng d
020 _a9781402045899
050 0 4 _aTK7874
100 1 _aDziuban, Jan A.
245 1 0 _aBonding in Microsystem Technology
_h[electronic resource] /
_cby Jan A. Dziuban.
250 _a1a ed.
260 _aDordrecht :
_bSpringer,
_c2006.
300 _bv.: digital
490 0 _aSpringer Series in Advanced Microelectronics,
_v24
_x1437-0387 ;
650 0 _aMicrotecnologĂ­a
650 4 _aSistemas microelectromecánicos
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
856 4 0 _uhttp://dx.doi.org/10.1007/1-4020-4589-1
942 _2lcc
_cLIE