| 000 | 00896nmm a22002535u 4500 | ||
|---|---|---|---|
| 005 | 20210312023745.0 | ||
| 008 | 100301s2008 gw j eng d | ||
| 020 | _a9783540766643 | ||
| 050 | 0 | 4 |
_aTS695 _bD47 2008 |
| 100 | 1 | _aDepla, Diederik. | |
| 245 | 1 | 0 |
_aReactive Sputter Deposition _h[electronic resource] / _cedited by Diederik Depla, Stijn Mahieu. |
| 250 | _a1a ed. | ||
| 260 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2008. |
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| 300 | _bv.: digital | ||
| 490 | 0 |
_aSpringer Series in Materials Science, _v109 _x0933-033X ; |
|
| 650 | 4 | _aDeposición catódica (Proceso galvanoplastia) | |
| 650 | 4 | _aPelículas delgadas | |
| 700 | 1 | _aMahieu, Stijn. | |
| 710 | 2 | _aSpringerLink (Online service) | |
| 773 | 0 | _tSpringer eBooks | |
| 856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-3-540-76664-3 |
| 942 |
_2lcc _cLIE |
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| 999 |
_c21881 _d21881 |
||