000			01292nmm a22003735u 4500
005			20210115191954.0
008			100301s2007 xx j eng d
020			_a9780387292618
050	0	4	_aQC176.83 _bA44 2007
100	1		_aAlford, Terry L.
245	1	0	_aFundamentals of Nanoscale Film Analysis _h[electronic resource] / _cby Terry L. Alford, Leonard C. Feldman, James W. Mayer.
260			_aBoston, MA : _bSpringer Science+Business Media, Inc., _c2007.
300			_bv.: digital
650		0	_aChemistry
650		0	_aCondensed matter
650		0	_aParticles (Nuclear physics)
650		0	_aElectronics
650		0	_aNanotechnology
650		0	_aSurfaces (Physics)
650	1	4	_aChemistry
650	2	4	_aCharacterization and Evaluation of Materials
650	2	4	_aSurfaces and Interfaces, Thin Films
650	2	4	_aNanotechnology
650	2	4	_aSolid State Physics and Spectroscopy
650	2	4	_aCondensed Matter
650	2	4	_aElectronics and Microelectronics, Instrumentation
700	1		_aFeldman, Leonard C.
700	1		_aMayer, James W.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-29261-8
942			_2lcc _cLIE
999			_c22758 _d22758