000			01065nmm a22003015u 4500
005			20210119134934.0
008			100301s2005 xx j eng d
020			_a9783540294993
050	0	4	_aTK7871.85 _bP47 2005
100	1		_aPerevoschikov, Victor A.
245	1	0	_aGettering Defects in Semiconductors _h[electronic resource] / _cby Victor A. Perevoschikov, Vladimir D. Skoupov.
250			_a1a ed.
260			_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005.
300			_bv.: digital
440		0	_aSpringer Series in Advanced Microelectronics, _x1437-0387 ; _v19
650		0	_aChemistry
650		0	_aChemical engineering
650		0	_aOptical materials
650	1	4	_aChemistry
650	2	4	_aOptical and Electronic Materials
650	2	4	_aIndustrial Chemistry/Chemical Engineering
700	1		_aSkoupov, Vladimir D.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/3-540-29499-6
942			_2lcc _cLIE
999			_c24584 _d24584