000			01290nmm a22003735u 4500
999			_c25288 _d25288
005			20200818225919.0
008			100301s2007 xx j eng d
020			_a9781402063800
050	0	4	_aTK7871.85 _bH35 2007
100	1		_aHall, Steve.
245	1	0	_aNanoscaled Semiconductor-on-Insulator Structures and Devices _h[electronic resource] / _cedited by Steve Hall, Alexei N. Nazarov, Vladimir S. Lysenko.
260			_aDordrecht : _bSpringer Netherlands, _c2007.
300			_bv.: digital
440		0	_aNATO Science for Peace and Security Series B: Physics and Biophysics, _x1874-6500
650		0	_aChemistry
650		0	_aComputer engineering
650		0	_aElectronics
650		0	_aOptical materials
650		0	_aNanotechnology
650	1	4	_aChemistry
650	2	4	_aOptical and Electronic Materials
650	2	4	_aNanotechnology
650	2	4	_aElectrical Engineering
650	2	4	_aElectronics and Microelectronics, Instrumentation
700	1		_aNazarov, Alexei N.
700	1		_aLysenko, Vladimir S.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-1-4020-6380-0
942			_2lcc _cLIE