000			01206nmm a22003255u 4500
005			20210513094919.0
008			100301s2005 xx j eng d
020			_a9783540268765
050	0	4	_aQC611.8.S5 _bF78 2005
100	1		_aFrühauf, Joachim.
245	1	0	_aShape and Functional Elements of the Bulk Silicon Microtechnique _h[electronic resource] : _bA Manual of Wet-Etched Silicon Structures / _cby Joachim Frühauf.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2005.
300			_bv.: digital
650		0	_aChemistry
650		0	_aChemical engineering
650		0	_aMicrowaves
650		0	_aElectronics
650		0	_aOptical materials
650	1	4	_aChemistry
650	2	4	_aOptical and Electronic Materials
650	2	4	_aElectronics and Microelectronics, Instrumentation
650	2	4	_aCeramics, Glass, Composites, Natural Methods
650	2	4	_aMicrowaves, RF and Optical Engineering
650	2	4	_aIndustrial Chemistry/Chemical Engineering
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/b138230
942			_2lcc _cLIE
999			_c26204 _d26204