Principles and Applications of NanoMEMS Physics [electronic resource] /
by Héctor J. Santos.
- Boston, MA : Springer, 2005.
- v.: digital
- Microsystems, 15 1389-2134 ; .
9780387258348
Chemistry Laser physics Quantum optics Optical materials Nanotechnology Chemistry Nanotechnology Optical and Electronic Materials Electronic and Computer Engineering Laser Technology and Physics, Photonics Quantum Optics, Quantum Electronics, Nonlinear Optics