Tan, Chuan Seng. <br/><br/>
Wafer Level 3-D ICs Process Technology  [electronic resource] / 
edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif. 
 - Boston, MA :  Springer-Verlag US,  2008. 
 -  v.: digital 
 - Integrated Circuits and Systems,  1558-9412 .
<br/><br/><label>ISBN: </label>9780387765341 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Engineering<br/>Electronics<br/>Optical materials<br/>Surfaces (Physics)<br/>Engineering<br/>Electronics and Microelectronics, Instrumentation<br/>Optical and Electronic Materials<br/>Surfaces and Interfaces, Thin Films<br/>Engineering, general
<br/><br/><label>LC Class. No.: </label>TK7874  / T36 2008