MEMS: A Practical Guide to Design, Analysis, and Applications - Korvink, Jan G.; Paul, Oliver; SpringerLink (Online service) (Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006)
Keywords: Engineering; Microwaves; Electronics; Optical materials; Nanotechnology; Engineering; Electronics and Microelectronics, Instrumentation; Optical and Electronic Materials; Nanotechnology; Microwaves, RF and Optical Engineering