Gettering Defects in Semiconductors [electronic resource] /
by Victor A. Perevoschikov, Vladimir D. Skoupov.
- 1a ed.
- Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
- v.: digital
- Springer Series in Advanced Microelectronics, 19 1437-0387 ; .
9783540294993
Chemistry Chemical engineering Optical materials Chemistry Optical and Electronic Materials Industrial Chemistry/Chemical Engineering