000			01101nmm a22003255u 4500
005			20210210034155.0
008			100528s2006 xx j eng d
020			_a9783540336556
050	0	4	_aTK7875 _bK67 2006
100	1		_aKorvink, Jan G.
245	1	0	_aMEMS: A Practical Guide to Design, Analysis, and Applications _h[electronic resource] / _cedited by Jan G. Korvink, Oliver Paul.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2006.
300			_bv.: digital
650		0	_aEngineering
650		0	_aMicrowaves
650		0	_aElectronics
650		0	_aOptical materials
650		0	_aNanotechnology
650	1	4	_aEngineering
650	2	4	_aElectronics and Microelectronics, Instrumentation
650	2	4	_aOptical and Electronic Materials
650	2	4	_aNanotechnology
650	2	4	_aMicrowaves, RF and Optical Engineering
700	1		_aPaul, Oliver.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-33655-6
942			_2lcc _cLIE
999			_c20830 _d20830