MEMS: A Practical Guide to Design, Analysis, and Applications

Korvink, Jan G.

MEMS: A Practical Guide to Design, Analysis, and Applications [electronic resource] / edited by Jan G. Korvink, Oliver Paul. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006. - v.: digital

9783540336556


Engineering
Microwaves
Electronics
Optical materials
Nanotechnology
Engineering
Electronics and Microelectronics, Instrumentation
Optical and Electronic Materials
Nanotechnology
Microwaves, RF and Optical Engineering

TK7875 / K67 2006

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