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Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Laconte, J.

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration [electronic resource] / by J. Laconte, D. Flandre, J. -P. Raskin. - Boston, MA : Springer, 2006. - v.: digital

ISBN: 9780387288437

Subjects--Topical Terms:
Engineering
Particles (Nuclear physics)
Physical optics
Electronics
Systems engineering
Surfaces (Physics)
Engineering
Physics and Applied Physics in Engineering
Electronics and Microelectronics, Instrumentation
Circuits and Systems
Solid State Physics and Spectroscopy
Applied Optics, Optoelectronics, Optical Devices
Surfaces and Interfaces, Thin Films

LC Class. No.: QC168 / L33 2006

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