Principles and Applications of NanoMEMS Physics [electronic resource] / by Héctor J. Santos.

By: Contributor(s): Material type: Computer fileComputer fileSeries: Microsystems ; 15Publication details: Boston, MA : Springer, 2005.Description: v.: digitalISBN:
  • 9780387258348
Subject(s): LOC classification:
  • QC688 S26 2005
Online resources: In: Springer eBooks
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