TY  - DATA
AU  - Yoshimura,Nagamitsu
ED  - SpringerLink (Online service)
TI  - Vacuum Technology: Practice for Scientific Instruments 
SN  - 9783540744337
PY  - 2008///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Physics
KW  - Weights and measures
KW  - Particles (Nuclear physics)
KW  - Engineering
KW  - Nanotechnology
KW  - Measurement Science, Instrumentation
KW  - Machinery and Machine Elements
KW  - Materials Science
KW  - Solid State Physics and Spectroscopy
UR  - http://dx.doi.org/10.1007/978-3-540-74433-7
ER  -