TY - DATA AU - Zhang,G.Q. AU - Driel,W.D. AU - Fan,X.J. ED - SpringerLink (Online service) TI - Mechanics of Microelectronics SN - 9781402049354 AV - TK874 Z43 2006 PY - 2006/// CY - Dordrecht PB - Springer KW - Engineering KW - Mechanical engineering KW - Mechanical Engineering KW - Numerical and Computational Methods in Engineering UR - http://dx.doi.org/10.1007/1-4020-4935-8 ER -