MEMS: A Practical Guide to Design, Analysis, and Applications [electronic resource] /
edited by Jan G. Korvink, Oliver Paul.
- Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006.
- v.: digital
9783540336556
Engineering Microwaves Electronics Optical materials Nanotechnology Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Microwaves, RF and Optical Engineering