TY  - DATA
AU  - Korvink,Jan G.
AU  - Paul,Oliver
ED  - SpringerLink (Online service)
TI  - MEMS: A Practical Guide to Design, Analysis, and Applications
SN  - 9783540336556
AV  - TK7875  K67 2006
PY  - 2006///
CY  - Berlin, Heidelberg
PB  - Springer-Verlag Berlin Heidelberg
KW  - Engineering
KW  - Microwaves
KW  - Electronics
KW  - Optical materials
KW  - Nanotechnology
KW  - Electronics and Microelectronics, Instrumentation
KW  - Optical and Electronic Materials
KW  - Microwaves, RF and Optical Engineering
UR  - http://dx.doi.org/10.1007/978-3-540-33655-6  
ER  -