TY  - DATA
AU  - Wong,Basil T.
AU  - Mengüç,M.Pinar
ED  - SpringerLink (Online service)
TI  - Thermal Transport for Applications in Micro/Nanomachining
T2  - Microtechnology and MEMS,
SN  - 9783540736073
AV  - TA418.9.N35  W66 2008
PY  - 2008///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Chemistry
KW  - Thermodynamics
KW  - Engineering
KW  - Electronics
KW  - Nanotechnology
KW  - Electronics and Microelectronics, Instrumentation
KW  - Engineering, general
UR  - http://dx.doi.org/10.1007/978-3-540-73607-3
ER  -