TY  - DATA
AU  - Laconte,J.
AU  - Flandre,D.
AU  - Raskin,J.-P.
ED  - SpringerLink (Online service)
TI  - Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
SN  - 9780387288437
AV  - QC168 L33 2006
PY  - 2006///
CY  - Boston, MA
PB  - Springer
KW  - Engineering
KW  - Particles (Nuclear physics)
KW  - Physical optics
KW  - Electronics
KW  - Systems engineering
KW  - Surfaces (Physics)
KW  - Physics and Applied Physics in Engineering
KW  - Electronics and Microelectronics, Instrumentation
KW  - Circuits and Systems
KW  - Solid State Physics and Spectroscopy
KW  - Applied Optics, Optoelectronics, Optical Devices
KW  - Surfaces and Interfaces, Thin Films
UR  - http://dx.doi.org/10.1007/0-387-28843-0
ER  -