Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures / [electronic resource] :
by Joachim Frühauf.
- Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005.
- v.: digital
9783540268765
Chemistry Chemical engineering Microwaves Electronics Optical materials Chemistry Optical and Electronic Materials Electronics and Microelectronics, Instrumentation Ceramics, Glass, Composites, Natural Methods Microwaves, RF and Optical Engineering Industrial Chemistry/Chemical Engineering