000			01220nmm a22003495u 4500
999			_c17265 _d17265
005			20201124125408.0
008			100301s2005 xx j eng d
020			_a9783540274124
050	0	4	_aQB121 _bS78 2005
100	1		_aLi, Flora M.
245	1	0	_aCCD Image Sensors in Deep-Ultraviolet _h[electronic resource] : _bDegradation Behavior and Damage Mechanisms / _cby Flora M. Li, Arokia Nathan.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2005.
300			_bv.: digital
440		0	_aMicrotechnology and Mems, _x1615-8326
650		0	_aChemistry
650		0	_aSpectrum analysis
650		0	_aElectronics
650		0	_aOptical materials
650	1	4	_aChemistry
650	2	4	_aOptical and Electronic Materials
650	2	4	_aOptical Spectroscopy, Ultrafast Optics
650	2	4	_aPhysics and Applied Physics in Engineering
650	2	4	_aElectronics and Microelectronics, Instrumentation
700	1		_aNathan, Arokia.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/b139047
942			_2lcc _cLIE