000			01178nmm a22003615u 4500
999			_c17582 _d17582
005			20200922223346.0
008			100301s2005 xx j eng d
020			_a9783540266679
050	0	4	_aTA1695 _bB37 2005
100	1		_aBasting, Dirk.
245	1	0	_aExcimer Laser Technology _h[electronic resource] / _cedited by Dirk Basting, Gerd Marowsky.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2005.
300			_bv.: digital
650		0	_aPhysics
650		0	_aChemistry, Physical organic
650		0	_aWeights and measures
650		0	_aElectromagnetism
650		0	_aLaser physics
650	1	4	_aPhysics
650	2	4	_aElectromagnetism, Optics and Lasers
650	2	4	_aPhysical Chemistry
650	2	4	_aMeasurement Science, Instrumentation
650	2	4	_aLaser Technology and Physics, Photonics
650	2	4	_aPhysics and Applied Physics in Engineering
700	1		_aMarowsky, Gerd.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/b137894
942			_2lcc _cLIE