000			01139nmm a22003495u 4500
001			978-3-540-74432-0
003			Springer
005			20150124122402.0
007			cr nn 008mamaa
008			100301s2008 xx j eng d
020			_a9783540744337
100	1		_aYoshimura, Nagamitsu.
245	1	0	_aVacuum Technology _h[electronic resource] : _bPractice for Scientific Instruments / _cby Nagamitsu Yoshimura.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2008.
300			_bv.: digital
650		0	_aPhysics
650		0	_aWeights and measures
650		0	_aParticles (Nuclear physics)
650		0	_aEngineering
650		0	_aNanotechnology
650	1	4	_aPhysics
650	2	4	_aMeasurement Science, Instrumentation
650	2	4	_aMachinery and Machine Elements
650	2	4	_aMaterials Science
650	2	4	_aSolid State Physics and Spectroscopy
650	2	4	_aNanotechnology
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-74433-7
912			_aZDB-2-PHA
999			_c18303 _d18303