000			01162nmm a22003375u 4500
005			20210517100426.0
008			100301s2007 xx j eng d
020			_a9783211728611
050	0	4	_aTK7871.85 _bG73 2007
100	1		_aGrasser, Tibor.
245	1	0	_aSimulation of Semiconductor Processes and Devices 2007 _h[electronic resource] : _bSISPAD 2007 / _cedited by Tibor Grasser, Siegfried Selberherr.
260			_aVienna : _bSpringer-Verlag Wien, _c2007.
300			_bv.: digital
650		0	_aEngineering
650		0	_aComputer simulation
650		0	_aElectronics
650		0	_aOptical materials
650		0	_aNanotechnology
650	1	4	_aEngineering
650	2	4	_aElectronics and Microelectronics, Instrumentation
650	2	4	_aOptical and Electronic Materials
650	2	4	_aNanotechnology
650	2	4	_aNumerical and Computational Methods in Engineering
650	2	4	_aSimulation and Modeling
700	1		_aSelberherr, Siegfried.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-211-72861-1
942			_2lcc _cLIE
999			_c18655 _d18655