000 01127nmm a22003375u 4500
005 20210412123336.0
008 100301s2008 xx j eng d
020 _a9783540736073
050 0 4 _aTA418.9.N35
_bW66 2008
100 1 _aWong, Basil T.
245 1 0 _aThermal Transport for Applications in Micro/Nanomachining
_h[electronic resource] /
_cby Basil T. Wong, M. Pinar Mengüç.
260 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg,
_c2008.
300 _bv.: digital
490 0 _aMicrotechnology and MEMS,
_x1615-8326
650 0 _aChemistry
650 0 _aThermodynamics
650 0 _aEngineering
650 0 _aElectronics
650 0 _aNanotechnology
650 1 4 _aChemistry
650 2 4 _aNanotechnology
650 2 4 _aElectronics and Microelectronics, Instrumentation
650 2 4 _aEngineering, general
650 2 4 _aThermodynamics
700 1 _aMengüç, M. Pinar.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-540-73607-3
942 _2lcc
_cLIE
999 _c21496
_d21496