000			01171nmm a22003855u 4500
999			_c22070 _d22070
005			20201130172033.0
008			100301s2006 xx j eng d
020			_a9780387287324
050	0	4	_aTK7875 _bU73 2006
100	1		_aUrban, Gerald A.
245	1	0	_aBioMEMS _h[electronic resource] / _cedited by Gerald A. Urban.
260			_aBoston, MA : _bSpringer, _c2006.
300			_bv.: digital
440		0	_aMicrosystems, _x1389-2134 ; _v16
650		0	_aEngineering
650		0	_aEngineering design
650		0	_aElectronics
650		0	_aSystems engineering
650		0	_aBiomedical engineering
650		0	_aNanotechnology
650	1	4	_aEngineering
650	2	4	_aCircuits and Systems
650	2	4	_aElectronic and Computer Engineering
650	2	4	_aEngineering Design
650	2	4	_aElectronics and Microelectronics, Instrumentation
650	2	4	_aBiomedical Engineering
650	2	4	_aNanotechnology
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-0-387-28732-4
942			_2lcc _cLIE