000			01170nmm a22003495u 4500
999			_c25694 _d25694
005			20200928090625.0
008			100301s2007 xx j eng d
020			_a9783540346135
050	0	4	_aTK7875 _bB43 2007
100	1		_aBechtold, Tamara.
245	1	0	_aFast Simulation of Electro-Thermal MEMS _h[electronic resource] : _bEfficient Dynamic Compact Models / _cby Tamara Bechtold, Evgenii B. Rudnyi, Jan G. Korvink.
250			_a1a ed.
260			_aBerlin, Heidelberg : _bSpringer-Verlag Berlin Heidelberg, _c2007.
300			_bv.: digital
650		0	_aEngineering
650		0	_aMechanics
650		0	_aElectronics
650		0	_aSystems engineering
650	1	4	_aEngineering
650	2	4	_aCircuits and Systems
650	2	4	_aElectronics and Microelectronics, Instrumentation
650	2	4	_aPhysics and Applied Physics in Engineering
650	2	4	_aMechanics
700	1		_aRudnyi, Evgenii B.
700	1		_aKorvink, Jan G.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-34613-5
942			_2lcc _cLIE